Miniaturized pressure sensor
US5195375A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Jul 11, 1991 |
| Grant date | Mar 23, 1993 |
| Priority date | — |
| Expiry date | Jul 11, 2011 |
Classification
- Technology area (CPC A)Human Necessities
- CPC primaryA61B5/02154
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A miniaturized pressure sensor for physiological in situ measurements has an elastic material shell having an outer surface with an opening extending therethrough. The opening is covered by an elastic diaphragm and a light conductor having an end surface is disposed inside the shell and connected thereto by a glue joint. A body of silicon or gallium is disposed inside the shell and has a thin, cantilevered, short beam portion and a reflecting surface connected to and perpendicularly projecting from a free end of the short beam portion. The reflecting surface is proximate to the end surface of the light conductor so that when the diaphragm is subjected to a pressure differential, it is forced to move thereby causing a corresponding movement of the short beam portion so that the reflecting surface is positioned opposite to the end surface of the light conductor.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.