Method of forming an optical channel waveguide by gettering
US5196041A · kind A · utility
56Cited by
4References
14Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 4, 1992 |
| Grant date | Mar 23, 1993 |
| Priority date | — |
| Expiry date | Feb 4, 2012 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B2006/12171
- WIPO fieldMaterials, metallurgy
- WIPO sectorChemistry
Abstract
A method of forming an optical channel waveguide by gettering includes forming on a substrate a porous waveguide layer containing an index of refraction raising dopant in a compound; sealing a portion of the waveguide layer along a path; and reacting the component, including the index of refraction raising dopant, with a reactant in the unsealed portion of the waveguide layer to form a volatile product from the reactant and dopant to deplete the dopant in the unsealed portion of the waveguide layer and reduce its index of refraction relative to that in the path to produce a channel waveguide along the path.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.