Magnetic positioning device
US5196745A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Aug 16, 1991 |
| Grant date | Mar 23, 1993 |
| Priority date | — |
| Expiry date | Aug 16, 2011 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/70716
- WIPO fieldMechanical elements
- WIPO sectorMechanical engineering
Abstract
A device for controlling the relative position between a movable platen and a stator, with linear motions, for example in the 200 to 300 mm range, being provided in one or two of the degrees of freedom and precision control in the 10 nm range being provided in six degrees of freedom. Linear motion is provided by adjacent pairs of magnetic arrays and coil arrays, with the magnetic array of each pair preferably being mounted to the platen and the coil array to the stator. Both arrays have smooth mating surfaces spaced by a predetermined gap. Adjacent magnets of each magnetic array are oppositely poled and each coil array has multiple phases, the pitches of the two adjacent arrays preferably being substantially equal. The weight of the platen may be supported by the magnetic and coil arrays or separate magnets may be provided for this purpose.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.