Modular scatterometer with interchangeable scanning heads
US5196906A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Jun 29, 1990 |
| Grant date | Mar 23, 1993 |
| Priority date | — |
| Expiry date | Jun 29, 2010 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2201/1266
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An optical measurement device produces quality light scatter measurements using Bidirectional Reflective Distribution Function (BRDF) techniques to analyze data generated from an accurate, portable, relatively inexpensive scatterometer. The scatterometer is provided with interchangeable scanning heads, each scanning head being equipped with ROM data storage containing certain configuration information about the scanning head. The use of the interchangeable scanning heads allows the present invention to make measurements of light scatter for a wide variety of applications and samples under a variety of environmental conditions where scatter measurement has previously not been feasible.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.