Method of manufacturing free standing perovskite lead scandium tantalate film
US5198158A · kind A · utility
0Cited by
0References
9Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 19, 1991 |
| Grant date | Mar 30, 1993 |
| Priority date | — |
| Expiry date | Nov 19, 2011 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC01P2004/84
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A method of manufacturing a free standing perovskite lead scandium tantalate film. A film of lead scandium tantalate is formed on a layer of MgO deposited on a sapphire substrate. The MgO layer is etched by phosphoric acid thereby releasing the lead scandium tantalate film from the substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.