Micro-machined resonator
US5198716A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Dec 9, 1991 |
| Grant date | Mar 30, 1993 |
| Priority date | — |
| Expiry date | Dec 9, 2011 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H9/1035
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
A micro-machined resonator, typically quartz, with upper and lower micro-machinable support members, or covers, having etched wells which may be lined with conductive electrode material, between the support members is a quartz resonator having an energy trapping quartz mesa capacitively coupled to the electrode through a diaphragm; the quartz resonator is supported by either micro-machined cantilever springs or by thin layers extending over the surfaces of the support. If the diaphragm is rigid, clock applications are available, and if the diaphragm is resilient, then transducer applications can be achieved. Either the thin support layers or the conductive electrode material can be integral with the diaphragm. In any event, the covers are bonded to form a hermetic seal and the interior volume may be filled with a gas or may be evacuated. In addition, one or both of the covers may include oscillator and interface circuitry for the resonator.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.