Cantilever mount for rotating cylindrical magnetrons
US5200049A · kind A · utility
31Cited by
10References
24Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 29, 1991 |
| Grant date | Apr 6, 1993 |
| Priority date | — |
| Expiry date | Jul 29, 2011 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/3405
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
An apparatus for rotatably mounting a cylindrical magnetron in a vacuum chamber. The apparatus includes a bearing housing having one end extending into the vacuum chamber with the other end located outside the chamber. A drive shaft is rotatably mounted in the bearing housing. Each end of the drive shaft extends beyond the housing. The cylindrical magnetron is attached to the end of the drive shaft inside the chamber. A vacuum seal is located in the bearing housing for sealing the drive shaft to the housing. The drive shaft is mounted in the housing such that the load of the magnetron is not transferred to the vacuum seal.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.