Ink recording apparatus
US5200768A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Nov 9, 1990 |
| Grant date | Apr 6, 1993 |
| Priority date | — |
| Expiry date | Nov 9, 2010 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB41J2/025
- WIPO fieldTextile and paper machines
- WIPO sectorMechanical engineering
Abstract
An ink recording apparatus used with printers or the like is manufactured by semiconductor device manufacturing techniques. One wall of an ink chamber is formed of a single-crystal substrate and an ink jet port is formed by etching the single-crystal substrate. The ink chamber has a pressure-applying unit therein, and the pressure is applied to ink within the ink chamber so that the ink is jetted through the ink jet port. The pressure-applying unit has piezoelectric elements. A shutter and electrodes composed of polycrystalline-silicon film are formed on the single-crystal substrate by film forming in the LPCVD method and patterning through plasma etching. A front wall is formed by coating the shutter and electrodes further with a polycrystalline-silicon film. The shutter is movable between the wall surface of the ink chamber and the front wall, being driven by an electrostatic attracting force produced between voltage-applied electrodes and the shutter. The electrodes are formed at positions corresponding to those where the shutter blocks the ink jet port and releases the same.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.