Device including a tapered microminiature silicon structure
US5204581A · kind A · utility
51Cited by
12References
12Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 2, 1992 |
| Grant date | Apr 20, 1993 |
| Priority date | — |
| Expiry date | Jun 2, 2012 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2209/0226
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Tapered silicon structures, of interest for use, e.g., in atomic force microscopes, in field-emission devices, and in solid-state devices are made using silicon processing technology. Resulting tapered structures have, at their tip, a radius of curvature of 10 nanometers or less.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.