Miniature silicon accelerometer and method
US5205171A · kind A · utility
95Cited by
8References
22Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 11, 1991 |
| Grant date | Apr 27, 1993 |
| Priority date | — |
| Expiry date | Jan 11, 2011 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01P2015/0828
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A miniature accelerometer is fabricated using integrated circuit manufacturing and silicon micromachining techniques to form a closed loop, force balance sensor utilizing a silicon proofmass formed from and connected to a layer of silicon by a split flexure etched therein. The sensor circuitry detects AC signals coupled from the proofmass to a pair of electrodes formed on glass surfaces anodically bonded to the silicon layer. A DC restorative force is applied to the electrodes in response to the detected AC signals to balance acceleration forces applied to the proofmass. The sensor design is highly symmetrical.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.