Pivoting air lock for a treatment chamber
US5205532A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Jun 2, 1992 |
| Grant date | Apr 27, 1993 |
| Priority date | — |
| Expiry date | Jun 2, 2012 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67126
- WIPO fieldMechanical elements
- WIPO sectorMechanical engineering
Abstract
In a pivoting air lock for the entry and/or exit of a substrate from one treatment chamber into an adjacent one or from atmospheric space into a chamber of lesser pressure, especially a slot air lock for a pass-through vacuum coating apparatus, with a flap-like valve plate (2) held in stationary bearings (11, 11a) and two closing motors (10, 10a) in active connection with the valve plate, the valve plate (2) is, with the interposition of two spring rods (5, 5a), linked to a valve beam (1) which in turn has two diametrically opposite journals (12, 12a) which are coupled for rotation with the shafts (18, 18a) of the motors (10, 10a), the shafts (18, 18a) of the motors (10, 10a) being brought in a pressure-proof manner through the wall (13, 13a) of the chamber (3).
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.