Wafer cushion for shippers
US5207324A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Mar 8, 1991 |
| Grant date | May 4, 1993 |
| Priority date | — |
| Expiry date | Mar 8, 2011 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67369
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A wafer cushion for a wafer shipper that has bottom cavity adapted to support a plurality of axially aligned wafer therein. The shipper further has a cover releasably interlockably with the bottom to sealably enclose the wafers within the shipper for storage or transportation. The cushion comprises a frame adapted to be supported by the cover within the wafer shipper. A plurality of aligned pairs of flexible arms depend downwardly from the frame. A plurality of cushioning segments are each individually supported by one pair of the arms and thereby are adapted to supportably engage and grip the top edge of the wafers suitably at the wafers' top centerline.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.