Clean room air system
US5207614A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Nov 7, 1991 |
| Grant date | May 4, 1993 |
| Priority date | — |
| Expiry date | Nov 7, 2011 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T137/86759
- WIPO fieldThermal processes and apparatus
- WIPO sectorMechanical engineering
Abstract
A clean room is supplied with air at a controllable velocity from a blower with a variable damper mechanism. The ceiling of the clean room is comprised of a plurality of panels of particulate filter material Associated with at least some of the panels are air dampers comprised of first, second, and third adjacent perforated plates. The first plate is fixed and the second plate is mounted for translational movement relative to the first. The third plate is interposed between the first and second plates as a gasket to reduce air flow between the plates. By moving the second plate relative to the first, the perforations therein are selectably opened or occluded, permitting the air passing through each panel to be regulated. Air flow through the room as a whole is controlled by the variable air flow feature of the blower.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.