Superconductor deposition system
US5207884A · kind A · utility
6Cited by
5References
5Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 24, 1990 |
| Grant date | May 4, 1993 |
| Priority date | — |
| Expiry date | Dec 24, 2010 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S505/786
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
To deposit a plurality of substances on a substrate while the substrate remains in a low pressure oxygen environment, several target carriers are mounted around the edge of a disc and the disc is rotated to position the targets at the focal point of a fixed laser. The target carriers are themselves rotatable in bearings on the disc and are turned by a sun gear that is carried about the same shaft that turns the disc so that the heat of the laser beam is not concentrated at one spot on the surface of the target. All the apparatus is contained in a oxygen chamber. The substrate is heated and the targets are cooled continuously.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.