Laser system for recording data patterns on a planar substrate
US5208818A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Dec 12, 1991 |
| Grant date | May 4, 1993 |
| Priority date | — |
| Expiry date | Dec 12, 2011 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG06K1/126
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A processless phototool generator uses a pulsed excimer laser to image a deformable mirror spatial light modulator onto a thin ablateable coating on a quartz substrate. The light pulse ablates and clears the coating from selected areas according to the data pattern in the deformable mirror array. Exposure uniformity is enhanced by a two dimensional overwriting method. The high image reduction ratio enables high power densities on the substrate without exceeding the permissible power density on the deformable mirror array. Since the recording is processless (i.e. no development required) the generated image can be verified immediately after writing. The last feature is of particular importance in phase-shift masks.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.