Apparatus to clean solid surfaces using a cryogenic aerosol
US5209028A · kind A · utility
187Cited by
20References
22Claims
0Family size
Assignees
Inventors
Key dates
| Filing date | Oct 9, 1992 |
| Grant date | May 11, 1993 |
| Priority date | — |
| Expiry date | Oct 9, 2012 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB24C9/003
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
The present invention is an apparatus for cleaning semi-conductor solid surfaces using a spray of frozen cryogen, such as argon, to impinge on the solid surface to remove contaminant particles. The apparatus includes an appropriate nozzle positioned in a housing designed for ultra clean conditions including sweep gas supply and evacuation conduits and a support table movably positioned within the housing to controllably convey the semi-conductor solid surface on a track under the spray of frozen cryogen emanating from the nozzle.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.