Semiconductor pressure-detecting apparatus
US5209120A · kind A · utility
13Cited by
3References
5Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Oct 2, 1991 |
| Grant date | May 11, 1993 |
| Priority date | — |
| Expiry date | Oct 2, 2011 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49103
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A semiconductor pressure-detecting apparatus includes a semiconductor chip having a diaphragm and a frame molded within a resin with the diaphragm exposed. A reference pressure chamber may be provided between the diaphragm and the frame. Since the diaphragm is exposed, a medium, the pressure of which is to be measured, easily contacts the diaphragm. Therefore, if the stem is connected to a case containing the medium, a high pressure can be measured.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.