Electron beam irradiation device and method of manufacturing an electron beam permeable window
US5210426A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Oct 15, 1991 |
| Grant date | May 11, 1993 |
| Priority date | — |
| Expiry date | Oct 15, 2011 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J5/18
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
This invention provides an electron beam irradiation device employing a material containing a Ti-A1 intermetallic composite as the material of an electron beam permeable window for allowing passage to the outside of a chamber of an electron beam generated in the chamber. Also, this invention provides a method of manufacturing an electron beam permeable window containing a Ti-A1 intermetallic composite by manufacturing a window-frame mounted titanium foil by fixing titanium foil between an outer window frame and an inner window frame of an electron beam permeable window, coating this with aluminium and titanium by converting aluminium and titanium to a metallic vapor state and subjecting this to thermal diffusion treatment.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.