Piezoelectric/electrostrictive actuator having ceramic substrate having recess defining thin-walled portion
US5210455A · kind A · utility
78Cited by
23References
11Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 23, 1991 |
| Grant date | May 11, 1993 |
| Priority date | — |
| Expiry date | Jul 23, 2011 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10N30/706
Abstract
A piezoelectric/electrostrictive actuator including a ceramic substrate (2, 10, 16, 22, 38) and a piezoelectric/electrostrictive portion (26, 28, 29, 30, 33a, 33b, 36a, 36b, 37, 39). The ceramic substrate has at least one recess (6, 14, 20, 24, 42) having a bottom surface which defines a thin-walled portion (8a, 22a), and the piezoelectric/electrostrictive portion is formed on the thin-walled portion of the ceramic substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.