Electrostatically controlled beam steering device and method
US5212582A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Mar 4, 1992 |
| Grant date | May 18, 1993 |
| Priority date | — |
| Expiry date | Mar 4, 2012 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG09F9/372
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
A device for steering light and its method of manufacture are disclosed. The device in the preferred embodiment consists of a multi-layer structure on a substrate. The substrate contains at least one electrode (36) for addressing a deflectable element (16) causing it to deflect towards the activated electrode (36). Upon the deflectable element (16) is at least one support post (62) which is positioned approximately along the axis of rotation (24) of the deflectable element (16). A reflecting element (61) is supported by the post (62) and deflects as the first element (16) deflects. The second element (62) is of far greater extent than the first element (16). Additionally, the method of manufacture of such a device is disclosed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.