Dry exhaust gas conditioning
US5213767A · kind A · utility
30Cited by
5References
19Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 3, 1990 |
| Grant date | May 25, 1993 |
| Priority date | — |
| Expiry date | Dec 3, 2010 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB01D53/68
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
This invention relates to gas treatment apparatus and methods and particularly, but not exclusively, to such apparatus and methods for use with exhaust products from semi-conductor manufacturing process. A reactor column 10 has an inlet 11 at the bottom and an outlet 12. Between the inlet and outlet it is divided into three sequential stages containing: silicon or silicon containing materials; lime or soda lime and copper oxide or copper oxide reagents.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.