Process for preparing ferrite films by radio-frequency generated aerosol plasma deposition in atmosphere
US5213851A · kind A · utility
20Cited by
4References
17Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 8, 1992 |
| Grant date | May 25, 1993 |
| Priority date | — |
| Expiry date | Apr 8, 2012 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C16/513
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
In accordance with this invention, there is provided an atmospheric process for the production of a ferritic coating or film. In the first step of this process, an aerosol mist containing reactants necessary to form the ferrite is provided. Thereafter, the mist is subjected to radio-frequency radiation while in the plasma region. Thereafter, the vaporized mixture is then deposited onto a substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.