Pressure sensor
US5214961A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Aug 13, 1991 |
| Grant date | Jun 1, 1993 |
| Priority date | — |
| Expiry date | Aug 13, 2011 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L9/0055
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A pressure sensor having a ceramic support, a first ceramic layer attached to a peripheral portion of one side of the ceramic support, and a second ceramic layer which is attached to a peripheral portion of another side of the ceramic support such that the pressure sensor is shaped as an integral assembly. The ratio of the thickness of the first ceramic layer to that of the second ceramic layer is in the range of 1:10 to 1:1. The ratio of the thicknesses of the first and second ceramic layers to thickness of the ceramic support is no more than 1:2. The pressure sensor further includes a hollow space formed between the ceramic support and at least one of the first and second ceramic layers so that, after shaping as an integral assembly, the ceramic layer or layers will work as a diaphragm that is capable of deformation under pressure.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.