Circuit pattern forming apparatus using MU-STM
US5216254A · kind A · utility
5Cited by
10References
4Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 1, 1990 |
| Grant date | Jun 1, 1993 |
| Priority date | — |
| Expiry date | May 1, 2010 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/887
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
An apparatus for forming a predetermined circuit pattern on a circuit substrate by using a .mu.-STM write head, the .mu.-STM write head comprising a write head substrate having a flat surface, a plurality of micro chip electrodes formed upright on the flat surface of the write head substrate and constituting a .mu.-STM, a level of a distal end of each of the chip electrodes being set to be constant, and scanning means for scanning the micro chip electrodes on the circuit substrate by moving the micro chip electrodes and the circuit substrate relative to each other in two-dimensional directions.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.