Coating, composed of an optically effective layer system, for substrates, whereby the layer system has a high anti-reflective effect, and method for the manufacturing of the coating

US5216542A · kind A · utility

Assignee

• Leybold GmBH · DE

Inventors

• Joachim Szczyrbowski · Goldbach, DE
• Klaus Hartig · Ronneburg, DE
• Stephan Roegels · Rodenbach, DE
• Anton Zmelty · Hösbach, DE

Key dates

• Filing date: Oct 19, 1990
• Grant date: Jun 1, 1993
• Expiry date: Oct 19, 2010

Classification

• Technology area (CPC C): Chemistry; Metallurgy
• CPC primary: C03C2217/73
• WIPO field: Materials, metallurgy
• WIPO sector: Chemistry

Abstract

A coating, composed of an optically effective layer system for substrates, whereby the layer system has a high antireflective effect. On a front side of the substrate, facing the observer, in sequence from the front side to the observer, a first layer is arranged on the substrate, functioning as dielectric and comprising metal oxide. Thereupon follows a second layer comprising nitride, preferably TiN.sub.x (x is equal to or greater than 1, preferably x=1.05). A third layer follows functioning as dielectric and comprising metal oxide. Thereupon a fourth layer follows comprising nitride, preferably TiN.sub.x (x is equal to or greater than 1, preferably x=1.05). A fifth layer follows functioning as dielectric comprising metal oxide. On a backside of the substrate a TiN.sub.x -layer (x.gtoreq.1, preferably x=1.05) is arranged. The adequate selection of certain materials for the individual layers, of certain layer thicknesses and of a certain sequence of the individual layers results in a surprisingly good antireflective coating, contrast increase and antistatic effect. These good optical features of the layer system are reached with a small number of layers and with thin layer thicknes…