Alignment transfer method
US5217550A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Sep 24, 1991 |
| Grant date | Jun 8, 1993 |
| Priority date | — |
| Expiry date | Sep 24, 2011 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T156/1707
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Prior to the press-contact between a pattern-transferring flat plate and a transfer-receiving flat plate, at least one of these flat plates is moved to a predetermined position to effect the positioning therebetween, while the positional relation between the pattern-transferring flat plate and the transfer-receiving flat plate is optically observed, and thereafter these flat plates are sequentially press-contacted to each other from an end of the flat plates. Therefore, there is no positional difference between the flat plates which have been correctly positioned, and further the adhesion strength between the transfer pattern and the transfer-receiving flat plate is uniform.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.