Patent · US Expired

Excimer laser with hydrogen chloride and method for producing hydrogen chloride for an excimer laser

US5220574A · kind A · utility

3Cited by

1References

7Claims

0Family size

Assignee

Lambda Physik Gesellschaft zur Herstellung von Larsen GmbH · DE

Inventors

Frank Voss · Berlin, DE
Dirk Basting · Fort Lauderdale, US
A. Meller · Göttingen, DE

Key dates

Filing date	Nov 19, 1991
Grant date	Jun 15, 1993
Priority date	—
Expiry date	Nov 19, 2011

Classification

Technology area (CPC H)Electricity
CPC primaryH01S3/036
WIPO fieldOptics
WIPO sectorInstruments

Abstract

An excimer laser having a chamber (10) in which a gas-discharge is performed with participation of hydrogen-chloride comprises means with which the hydrogen chloride is formed by hydrolysis.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.