Method of forming microfabricated cantilever stylus with integrated pyramidal tip
US5221415A · kind A · utility
68Cited by
3References
8Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 26, 1990 |
| Grant date | Jun 22, 1993 |
| Priority date | — |
| Expiry date | Nov 26, 2010 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01Q70/16
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A dielectric cantilever arm stylus with an integrally formed pyramidal tip is provided. The tip is molded in a pyramidal pit etched in a later-removed (100) silicon substrate. An integrally-formed cantilever arm is also formed as the tip is being formed. Various thin film materials form the cantilever arm and the tip. In one embodiment of the invention, the dielectric is silicon nitride. The cantilever arm is anodically bonded to a glass block.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.