Coherence delay augmented laser beam homogenizer
US5224200A · kind A · utility
80Cited by
2References
17Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 27, 1991 |
| Grant date | Jun 29, 1993 |
| Priority date | — |
| Expiry date | Nov 27, 2011 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01S3/005
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
The geometrical restrictions on a laser beam homogenizer are relaxed by ug a coherence delay line to separate a coherent input beam into several components each having a path length difference equal to a multiple of the coherence length with respect to the other components. The components recombine incoherently at the output of the homogenizer, and the resultant beam has a more uniform spatial intensity suitable for microlithography and laser pantogography. Also disclosed is a variable aperture homogenizer, and a liquid filled homogenizer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.