Method for cleaning closed spaces with ultraviolet rays
US5225000A · kind A · utility
23Cited by
2References
1Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 29, 1991 |
| Grant date | Jul 6, 1993 |
| Priority date | — |
| Expiry date | Oct 29, 2011 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB03C3/16
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
Cleaning a closed space such as safety cabinets, clean boxes, safes and wafer storage spaces are performed by irradiating a photoelectron emitting member with ultraviolet rays and/or other forms of radiation to emit photoelectrons into the closed space, electrically charging the fine particles in the closed space with the emitted photoelectrons, and removing the charged fine particles from the closed space.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.