Surface inspection apparatus and method
US5225890A · kind A · utility
21Cited by
21References
10Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 28, 1991 |
| Grant date | Jul 6, 1993 |
| Priority date | — |
| Expiry date | Oct 28, 2011 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2021/8905
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An apparatus for inspecting a reflective surface of an article for defects includes a point light source for generally uniformly illuminating the entire surface of the article under inspection, and a diffusing screen for intercepting the light rays reflected from the surface under inspection of the article. The intercepted light rays produce a high resolution image on the screen consisting of bright and dark areas or spots corresponding to surface defects in the article under inspection.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.