Scanning microscope employing improved scanning mechanism
US5225923A · kind A · utility
55Cited by
14References
19Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jul 9, 1992 |
| Grant date | Jul 6, 1993 |
| Priority date | — |
| Expiry date | Jul 9, 2012 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B21/002
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A confocal microscope (10) includes a scanner assembly (38) in which the x-axis deflector assembly includes two resonant scanners (50 and 52) that oscillate about parallel axes at different frequencies, one of which is a harmonic of the other. As a consequence, the x-axis scan can be nearly linear even though it is provided resonantly and thus benefits from the high-speed capabilities of resonant systems. A galvanometer (64) pivots the housing of one of the resonant scanners (50) about its axis so as to provide x-axis panning.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.