Digital micromirror shutter device
US5226099A · kind A · utility
386Cited by
4References
38Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 26, 1991 |
| Grant date | Jul 6, 1993 |
| Priority date | — |
| Expiry date | Apr 26, 2011 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B6/3584
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
There is disclosed a device that consists of a micro-mechanical switch consisting of an electrode, a gap between the electrode and an individually deflectable element, which has a vertical shutter attached to its underside. When the electrode is addressed the movement of the deflectable element causes the shutter to raise or lower. Such a device can be used in switching. One embodiment of such a use in waveguides is disclosed along with the method of manufacture.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.