Laser ablation apparatus
US5227608A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Jul 31, 1992 |
| Grant date | Jul 13, 1993 |
| Priority date | — |
| Expiry date | Jul 31, 2012 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB23K26/361
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
A laser ablation apparatus includes a laser beam source for ablation for emitting a first laser beam, a lens for focusing the first laser beam, a vacuum chamber having a window on its wall through which the first laser beam is injected into the vacuum chamber, a target holder arranged in the vacuum chamber to hold a target onto which the first laser beam is irradiated, a substrate holder arranged opposing to the target holder in the vacuum chamber to hold a substrate, and a laser beam source for particle decomposition for emitting a second laser beam in the vacuum chamber to decompose particles turned out from the target by the first laser beam in the vacuum chamber. The apparatus can further include a pair of mirrors, arranged on both sides of the target holder, for multiply reflecting the second laser beam over the target holder.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.