Integrated circuit inductor
US5227659A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Dec 27, 1991 |
| Grant date | Jul 13, 1993 |
| Priority date | — |
| Expiry date | Dec 27, 2011 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10D84/00
Abstract
An integrated circuit inductor is disclosed which can be fabricated by adding simple follow-on steps to standard fabrication line processes. In a preferred embodiment, standard CMOS technology is used to fabricate a multi-turn coil having its axis normal to the layers of oxide, polysilicon, and metal which form the coil. For a coil 100 microns on a side, an inductance on the order of 10 nH can be achieved. By including a magnetic core in the design using the disclosed procedure, this value can be increased to as high as 0.1 mH. Thus, inductor values ranging from 0.001 mH-0.1 mH can be physically implemented as integrated, highly-miniaturized CMOS designs for analog operation in the range of approximately 1-100 MHz.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.