Method and apparatus for obtaining two-dimensional energy image, using charged-particle beam
US5231287A · kind A · utility
8Cited by
4References
4Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 18, 1992 |
| Grant date | Jul 27, 1993 |
| Priority date | — |
| Expiry date | Feb 18, 2012 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/256
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A scanning Auger spectrometer using a cylindrical mirror analyzer. This analyzer is set to a given value Eo. A deviation .DELTA.E of the energy actually measured by the analyzer from the set value Eo occurs. The relation of the deviation .DELTA.E to the coordinates of each analyzed point is measured. During the measurements, the set energy is shifted in response to the position hit by the electron beam according to information obtained from the measurements in such a way that the deviation does not take place.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.