Silicon-mass angular acceleration sensor
US5233213A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Jun 4, 1992 |
| Grant date | Aug 3, 1993 |
| Priority date | — |
| Expiry date | Jun 4, 2012 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01P2015/084
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
From a silicon block or wafer a stationary frame is shaped and a seismic mass which is displaceable in rotation is mounted within the frame. The seismic mass is symmetrically suspended in the frame by two pairs of oppositely located flexible strips and either piezoresistive or capacitive detection of rotation is provided by the strips, the capacitive detection beeing provided with the help of parallel stationary electrodes connected to and insulated in the frame. In another embodiment an anchor stud in the center of the frame has two flexible interlaced spirals extending therefrom and their respective outer turns carry radial disposed masses with finger structures extending circumferentially in both directions. Stationary finger structures are provided to provide interfitting variable capacitors sensitive to rotary displacements.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.