Resonant mirror and method of manufacture
US5233456A · kind A · utility
321Cited by
8References
20Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Dec 20, 1991 |
| Grant date | Aug 3, 1993 |
| Priority date | — |
| Expiry date | Dec 20, 2011 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B26/0841
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A resonant mirror is disclosed which comprises a deflectable mirror generally planar with the stop surface of a substrate. The mirror is suspended adjacent the top surface by at least two supporting elements. At least one supporting element is displaced from an edge of the mirror. The supporting elements, being collinear, define an axis of rotation about which the mirror may oscillate to steer incident light through an angle.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.