Polymeric metal oxide materials and their formation and use
US5234556A · kind A · utility
40Cited by
1References
28Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 20, 1990 |
| Grant date | Aug 10, 1993 |
| Priority date | — |
| Expiry date | Aug 20, 2010 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/31504
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A method of treating a metal alkoxide solution to form metal oxide prepolymer molecules therein is characterized by irradiating the solution with light energy having a wavelength selected to break the metal-alkoxy group bond in said metal alkoxide, thereby to form the metal oxide prepolymer molecules in the solution. The prepolymer is converted into polymeric metal oxide gel. The stoichiometry of the oxide is high. A gel of carbon content below 4 atomic % can be achieved by the step of decarbonizing the gel, preferably using light to produce ozone.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.