Polylactide compounds as sensitivity enhancers for radiation sensitive mixtures containing o-quinonediazide photoactive compounds
US5234789A · kind A · utility
6Cited by
3References
9Claims
0Family size
Assignee
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Key dates
| Filing date | Mar 19, 1992 |
| Grant date | Aug 10, 1993 |
| Priority date | — |
| Expiry date | Mar 19, 2012 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/0233
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A radiation-sensitive composition comprising an admixture in a solvent of: at least one alkali-soluble binder resin, at least one photoactive compound and an effective sensitivity enhancing amount of at least one polylactide compound; the amount of said binder resin being about 60 to 95% by weight, the amount of said photoactive component being about 5% to about 40% by weight, based on the total solids content of said radiation-sensitive composition.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.