Linear electrostatic actuator with means for concatenation
US5235225A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Aug 31, 1990 |
| Grant date | Aug 10, 1993 |
| Priority date | — |
| Expiry date | Aug 31, 2010 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH02N1/004
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
Miniaturized linear electrostatic motor comprising a plurality of parallel stators and a flexible rotor disposed between adjacent stators. The stators may be fabricated by depositing a plurality of conductive electrodes on each facing surface of the stator or the electrodes may alternatively be placed on the flexible rotor element. The electrodes are selectively energized by a commutating circuit in a manner to effect movement of the rotor relative to the stator in a perpendicular to parallel motion. The electrostatic motor is particularly suitable for fabrication using photo-lithographic techniques and the formation of multi-layered, concatenated motor structures.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.