Zinc oxide sintered body, and preparation process and use thereof
US5236632A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Mar 2, 1992 |
| Grant date | Aug 17, 1993 |
| Priority date | — |
| Expiry date | Mar 2, 2012 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01B1/08
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
An electroconductive zinc oxide sintered body composed of sintered particles fusion-bonded in the grain boundaries thereof; which has a sintered density of from 5 to 5.5 g/cm.sup.3 ; and which does not substantially contain closed cells isolated from the outside in the interior of the sintered body. The electroconductive zinc oxide sintered body is prepared by sintering a mixture of an oxide of an element having a positive valency of at least 3 and zinc oxide in the presence of water at a temperature of at least 1,300.degree. C. The electroconductive zinc oxide sintered body is used as a sputtering target for the preparation of a low resistance, transparent electroconductive film.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.