Production of oxide superconducting films by laser sputtering using N.sub.2 .sub.2
US5236895A · kind A · utility
2Cited by
2References
4Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 23, 1991 |
| Grant date | Aug 17, 1993 |
| Priority date | — |
| Expiry date | Jul 23, 2011 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S505/732
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
There is provided in a process for depositing a metal oxide superconducting film on a substrate by laser sputtering, the improvement which comprises carrying out the deposition of the metal oxide superconducting film in the presence of a gas having higher oxidation potential than oxygen.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.