Inspection apparatus with improved detection of surface defects over large and curved surfaces
US5237404A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Jun 28, 1991 |
| Grant date | Aug 17, 1993 |
| Priority date | — |
| Expiry date | Jun 28, 2011 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2021/9518
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A surface defect inspection apparatus includes a light radiation source, arranged to oppose a surface to be inspected serving as a mirror surface, for radiating light having a predetermined change pattern toward the surface to be inspected, a camera mechanism for receiving an image of the light radiation source, reflected by the surface to be inspected and forming a received-light image corresponding to the change pattern of the light radiation source, and a discriminator for discriminating a surface defect portion on the surface to be inspected by discriminating a portion whose change pattern is different from the change pattern on the basis of the received-light image formed by the camera mechanism.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.