Turbomolecular pump
US5238362A · kind A · utility
28Cited by
11References
4Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 21, 1992 |
| Grant date | Aug 24, 1993 |
| Priority date | — |
| Expiry date | Jul 21, 2012 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF04D23/008
- WIPO fieldEngines, pumps, turbines
- WIPO sectorMechanical engineering
Abstract
A high vacuum pump comprising an in-line connection on a single drive shaft of an axial turbomolecular compressor and a peripheral compressor where the pump provides better than 10.sup.-7 Pascal inlet when exhausting to atmosphere. The peripheral compressor has a two stage optimized Gaede design which encloses the impellers in a shroud reducing the top and bottom volume surrounding the impellers and providing a large separation pressure drop region between stages of said peripheral compressors to reduce axial leakage.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.