Molded articles for holding wafers
US5240753A · kind A · utility
17Cited by
6References
14Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 22, 1991 |
| Grant date | Aug 31, 1993 |
| Priority date | — |
| Expiry date | Feb 22, 2011 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/1372
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
The present invention provides a molded article for holding wafers which is made of a thermoplastic resin reinforced with whiskers. The present invention provides wafer holding molded articles, such as transport baskets, storage cases and carriers, for use in handling wafers and glass plates for liquid crystal televisions. These articles are useful for cleaning, drying, transporting or storing semiconductor wafers free of contamination.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.