Erosion/corrosion resistant diaphragm
US5241131A · kind A · utility
11Cited by
10References
27Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 14, 1992 |
| Grant date | Aug 31, 1993 |
| Priority date | — |
| Expiry date | Apr 14, 2012 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/30
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
The present invention relates generally to a new erosion/corrosion resistant diaphragm, and more particularly to an erosion/corrosion resistant diaphragm that can be used in an apparatus for cooling integrated circuit chips. An erosion/corrosion resistant coating can be provided on one side of a metallic foil that will be exposed to fluid impingement. And, a similar erosion/corrosion resistant coating can be provided on the opposite side of the metallic foil where the normal thermal cycling of the chip might damage the unprotected metallic foil.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.