Vertical XY stage
US5241183A · kind A · utility
50Cited by
2References
9Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 19, 1992 |
| Grant date | Aug 31, 1993 |
| Priority date | — |
| Expiry date | Mar 19, 2012 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG12B5/00
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A vertical XY stage includes a base, an X-axis slider, a Y-axis slider, and a stage. The X-axis slider is movably mounted on the base. The Y-axis slider is movably mounted on the X-axis slider. Workpieces are arranged on the stage. The Y-axis slider includes a horizontally arranged slider main body, and a vertical portion vertically arranged and having a guide for allowing the Y-axis slider to move in a Y-axis direction. The stage is arranged in a space surrounded by the slider main body and the vertical portion of the Y-axis slider. The stage can be pivoted through a shaft mounted on the Y-axis slider.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.