Process for protecting surfaces against ambient particulate contamination with the aid of blowing elements
US5241758A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Apr 23, 1991 |
| Grant date | Sep 7, 1993 |
| Priority date | — |
| Expiry date | Apr 23, 2011 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB08B17/02
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
The blowing ramp formed by the blowing elements makes it possible to maintain under an ultra-clean atmosphere the planar services of objects during their transportion or conveying, whilst using a limited air flow; the blowing elements are mainly constituted by a plate 2 having a central orifice 6 facing which is located a pipe 4 supplied with ultra-clean air; the process consists of placing the surface (11) of the object (10) at a distance (d) of approximately 1 mm from the blowing surface (7). The flow of air between these two surfaces is easily regulated in such a way as to be laminar, thus providing protection against ambient particulate contamination, which application may be applied to the conveying of silicon wafers.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.