Manufacture of high precision electronic components with ultra-high purity liquids
US5242468A · kind A · utility
41Cited by
21References
11Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 19, 1991 |
| Grant date | Sep 7, 1993 |
| Priority date | — |
| Expiry date | Mar 19, 2011 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S134/902
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
Semiconductor wafers and other electronic parts which similarly require ultra-high purity manufacturing environments are treated with ultra-high purity liquid cleaning and etching agents prepared at the site of use from gaseous raw materials which have been purified to a level compatible with semiconductor manufacturing standards, combined when appropriate with ultra-pure water.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.